Abstract
In this study, we use microfabrication processes on silicon to produce a rectangular microchannel. The fabrication technology includes exposing, dry etching, and anodic bounding technologies. After fabrication finished, we use AFM and alpha-step to secure surface roughness. It is found a relatively low surface roughness about 3.34¢H with dimension of 0.5£gm¡Ñ100£gm¡Ñ5000£gm microchannel.
A theoretical study and calculations, we also made with continuity equation and proper slip condition to analyze fluid behavior in microchannel. At present, several fluid informations in microchannel that incloud pressure drop, fluid velocity, and fluid mass flow rate were obtained.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0709102-150752 |
| Date | 09 July 2002 |
| Creators | Chien, Cheng-Ming |
| Contributors | S. S. Hsieh, C. J. Ho, C. C. Su |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0709102-150752 |
| Rights | unrestricted, Copyright information available at source archive |
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