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Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates

Thesis (M.S.)--Ohio University, August, 1995. / Title from PDF t.p.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/231379059
Date January 1995
CreatorsChakravarthy, Pramod.
PublisherOhio : Ohio University,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to resource online

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