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Nanometer-scale electron beam lithography over large areas

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.317706

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:317706
Date	January 1989
Creators	Chen, Zhong Wei
Publisher	University of Cambridge
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation