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A study of electrical, optical and structural properties of RF sputtered and ion beam sputtered silicon films

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.380853

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:380853
Date	January 1988
Creators	Awang Mat, A. F.
Publisher	University of Reading
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation