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Mechanisms of direct electron beam nanolithography and nanostructure fabrication methods

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.321028

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:321028
Date	January 1994
Creators	Chen, Giin-Shan
Publisher	University of Cambridge
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation