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Gate dielectrics for ULSI produced by plasma anodisation

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:240311
Date January 1992
CreatorsKennedy, Gary Paul
PublisherUniversity of Liverpool
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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