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Inductively coupled Ar/Clâ‚‚ plasma etching of GaN

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288895

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:288895
Date	January 2003
Creators	Rizvi, Syed Shabbar Abbas
Publisher	University of Ulster
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation