Epitaxial oxide growth on Si(001) for floating epitaxy, a novel process for silicon-on-insulator wafer production

Description

Thesis (M.S.)--North Carolina State University. / Includes vita. Includes bibliographical references.

Links & Downloads

1. http://www.lib.ncsu.edu/theses/available/etd-08102006-092445/unrestricted/etd.pdf

Tags

North Carolina State University

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/85841808
Date	January 2006
Creators	Hydrick, Jennifer Marie.
Source Sets	OCLC
Language	English
Detected Language	English