Design and fabrication of a MEMS pressure sensor and developing a release protocol for MEMS

Description

Thesis (M.S.)--North Carolina State University. / Includes vita. Includes bibliographical references (p. 53-54).

Links & Downloads

1. http://www.lib.ncsu.edu/theses/available/etd-08132002-120836/unrestricted/etd.pdf

Tags

North Carolina State University

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/50511065
Date	January 2002
Creators	Bhate, Kaustubh Ramesh,
Source Sets	OCLC
Language	English
Detected Language	English