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In-situ deposition of YBa₂Cu₃O₇₋x superconducting films by aerosol decomposition in a plasma enhanced chemical vapor deposition reactor

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Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/20024
Date12 1900
CreatorsChung, Yong-Sun
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Detected LanguageEnglish
TypeDissertation
RightsAccess restricted to authorized Georgia Tech users only.

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