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Mechanistic analysis of the thermally induced decomposition of certain metal beta-diketonate precursors for chemical vapor deposition of electronic materials

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1. 493786
2. http://hdl.handle.net/1853/30743

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/30743
Date	05 1900
Creators	Obi-Johnson, Bettie Jeanne
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Dissertation