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A study of the effect of ionization efficiency during deposition on the properties of chromium PVD films

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1. http://hdl.handle.net/1853/20003
2. 308900

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/20003
Date	12 1900
Creators	Yu, Chen-Hua Douglas
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Dissertation
Rights	Access restricted to authorized Georgia Tech users only.