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Characterization of chemical structure, morphology, and mechanical response of polyurethane surface domains as a result of exposure to common chemical mechanical planarization (CMP) environments

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1. https://stars.library.ucf.edu/rtd/1658

Identifer	oai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-2657
Date	01 October 2002
Creators	Ramsdell, Jeffrey E.
Publisher	STARS
Source Sets	University of Central Florida
Language	English
Detected Language	English
Type	text
Source	Retrospective Theses and Dissertations