An investigation was conducted to determine whether a “size effect”
phenomenon for one particular thermophysical property, thermal conductivity, actually
exists for amorphous poly(methyl methacrylate) (PMMA) films with thicknesses ranging
from 40 nm to 2 μm. This was done by using a non-contact, non-invasive, in-situ
Transient Thermo-Reflectance (TTR) laser based technique. The results demonstrated
that the intrinsic thermal conductivity of a 40 nm PMMA film deposited on native oxide
of silicon increases by a factor of three over bulk PMMA values, and a distinct increase
in the thermal conductivity of PMMA film was observed in ultra-thin (sub 100 nm)
films. This confirmed the importance of film thickness for the through-plane thermal
conductivity value of PMMA film on native oxide of silicon.
Identifer | oai:union.ndltd.org:tamu.edu/oai:repository.tamu.edu:1969.1/ETD-TAMU-1348 |
Date | 15 May 2009 |
Creators | Kim, Ick Chan |
Contributors | Marotta, Egidio E. |
Source Sets | Texas A and M University |
Language | en_US |
Detected Language | English |
Type | Book, Thesis, Electronic Thesis, text |
Format | electronic, application/pdf, born digital |
Page generated in 0.0017 seconds