ITO is a wide band gap semiconductor material, its band gap is from 4.7 eV to 5.2 eV. Due to the low resistivity, high transmittance to visible light, great absorption to UV light, and high reflection to IR, ITO is wide used to photovoltatic application; such as anodic electrode of Liquid Crystal Display (LCD) and photovoltaic devices.
In the thesis, samples are deposited with an ITO layer on color filter (CF) by magnetron sputtering. The conductivity of samples is measured by 4-probe measurement, and the transmittance is characterized by visible spectroscopy. In this work is heat treatment parameters of temperature and annealing time of ITO thin film know been studied, and found an optima condition.
From the experiment results, an optima heat treatment condition is temperature of 200¢Jfor 40 minutes, which reveals lower resistivity and improved transmittance of ITO samples. And, it is less process time and lower treatment temperature to used condition for industry presently. The reducing time of heat treatment will increase 9.9 % production, and enhancing the properties of color filter. Depending on the results of this work, there is space to improve performance and reduce power for fabrication of color filter.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0108110-012303 |
| Date | 08 January 2010 |
| Creators | Chang, Ming-chih |
| Contributors | Mei-Ying Chang, Tai-Fa Young, Yuang-Cherng Chiou, Ting-Chang Chang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0108110-012303 |
| Rights | not_available, Copyright information available at source archive |
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