<p>In several x-ray related areas there is a need for high-precision elements for x-ray generation and focusing. An elegant way of realizing x-ray related elements with high precision and low surface roughness is by the use of microfabrication; a combination of semiconductor processing techniques and miniaturization. Photolithographic patterning of silicon followed by deposition, etching, bonding and replication is used for batchwise fabrication of small well-defined structures. This thesis describes microfabrication of a miniature x-ray source and a refractive x-ray lens. A miniature x-ray source with diamond electrodes has been tested for x-ray fluorescence. Another version of the source has been vacuum encapsulated and run at atmospheric pressure. One-dimensionally focusing saw-tooth refractive x-ray lenses in silicon, epoxy, and diamond have been fabricated and tested in a synchrotron set-up. Sub-micron focal lines and gains of up to 40 were achieved. The conclusion of the thesis is that the use of microfabrication for construction of x-ray related components can not only improve the performance of existing components, but also open up for entirely new application areas.</p>
| Identifer | oai:union.ndltd.org:UPSALLA/oai:DiVA.org:uu-3099 |
| Date | January 2002 |
| Creators | Ribbing, Carolina |
| Publisher | Uppsala University, Department of Materials Science, Uppsala : Acta Universitatis Upsaliensis |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Doctoral thesis, comprehensive summary, text |
| Relation | Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, 1104-232X ; 787 |
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