This diploma thesis deals with a design modification of detection part of the laboratory instrument for measuring the topography of rough surfaces – laser goniometric scatterometer (SM II). Design modification is based on replacement of so far used detector instead for the detector of higher quality with better measurement parameters. The first part of the diploma thesis contains theoretical basics, which are necessary to understand the relationship between scalar diffraction theory and scattering measurements of monochromatic light. The emphasis is on the importance of choosing appropriate detection coordinates, which are affecting the aberrations of detected diffracted light. The practical part is dedicated to improving the sensitivity of the detection part of the scatterometer SM II that is used in The laboratory of coherence optics at IFE FME BUT. This part justifies the choice of the detector which predetermines both the use of optical elements and the overall design of the detection part as the goniometer.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:417166 |
| Date | January 2020 |
| Creators | Jaworková, Magdalena |
| Contributors | Klapetek, Petr, Ohlídal, Miloslav |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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