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Topná MEMS platforma pro chemické senzory / MEMS microhotplate platform for chemical sensors

This master’s thesis deals with design and fabrication of MEMS microhotplate platform for chemical gas sensors. The theoretical part describes MEMS, sensors and processes and technologies needed for fabrication of micro hotplate. The practical part includes simulations, masks and step by step microhotplate fabrication. Fabricated heating membrane was characterized and compared to theoretical values from simulations and to similar devices presented in literature.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:377046
Date January 2018
CreatorsVančík, Silvester
ContributorsSvatoš, Vojtěch, Prášek, Jan
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageSlovak
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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