Surface cleaning and thin film etching using high pressure and supercritical fluids /

Description

Thesis (Ph. D.)--Lehigh University, 1997. / Includes vita. Includes bibliographical references.

Links & Downloads

1. http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:9715033

Tags

Thin film devices Microelectronics

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/36789212
Date	January 1996
Creators	Bakker, Geoffrey L.,
Source Sets	OCLC
Language	English
Detected Language	English
Type	Academic dissertations