Poly-Si/Poly-Si(1-x)Ge(x) by sputtering techniques for thin film pMOSFET applications /

Description

Thesis (MEng)--University of South Australia, 1997

Links & Downloads

1. http://arrow.unisa.edu.au:8081/1959.8/80138
2. http://arrow.unisa.edu.au/vital/access/manager/Repository/unisa:43395

Tags

Silicon alloys.

Thin film devices.

Additional Fields

Identifer	oai:union.ndltd.org:ADTP/268084
Creators	Priyanto, Muh. Wahid.
Source Sets	Australiasian Digital Theses Program
Language	English
Detected Language	English
Rights	copyright under review