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Atmospheric pressure chemical vapour deposition of titanium nitride from titanium tetrachloride and ammonia

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.242208

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:242208
Date	January 1996
Creators	Johnson, Saccha Ellen
Publisher	University of Southampton
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation