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Synthesis and characterization of nanocrystalline Cu(CuOx)/Al2O3 composite thin films. / 納米銅(銅的氧化物)與三氧化二鋁復合物薄膜的製備和特性研究 / Synthesis and characterization of nanocrystalline Cu(CuOx)/Al2O3 composite thin films. / Na mi tong (tong de yang hua wu) yu san yang hua er lv fu he wu bo mo de zhi bei he te xing yan jiu

Xu Yan = 納米銅(銅的氧化物)與三氧化二鋁復合物薄膜的製備和特性研究 / 許燕. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2003. / Includes bibliographical references (leaves 50-51). / Text in English; abstracts in English and Chinese. / Xu Yan = Na mi tong (tong de yang hua wu) yu san yang hua er lv fu he wu bo mo de zhi bei he te xing yan jiu / Xu Yan. / Abstract --- p.i / 摘要 --- p.ii / Acknowledgements --- p.iii / Table of Contents --- p.iv / List of Figures --- p.viii / List of Tables --- p.xi / Chapter CHAPTER 1 --- Introduction / Chapter 1.1 --- Nanostructured Materials --- p.1 / Chapter 1.2 --- Objective of this Work --- p.1 / Chapter CHAPTER 2 --- Background / Chapter 2.1 --- Correlation of AES-CuLMM spectrum and Cu nanocluster size --- p.3 / Chapter 2.1.1 --- Typical AES-CuLMM spectra --- p.3 / Chapter 2.1.2 --- A simplified model --- p.4 / Chapter 2.1.3 --- correlation of AES-CuLMM spectra and the simplified model --- p.4 / Chapter 2.2 --- Previous works --- p.5 / Chapter CHAPTER 3 --- Instrumentation / Chapter 3.1 --- Sputtering --- p.6 / Chapter 3.1.1 --- Principles of sputtering --- p.6 / Chapter 3.1.1.1 --- Concepts of sputtering --- p.6 / Chapter 3.1.1.2 --- Initiating the plasma --- p.8 / Chapter 3.1.1.3 --- Depositing a film onto the substrate --- p.8 / Chapter 3.1.2 --- Radio-frequency (RF) magnetron sputtering --- p.9 / Chapter 3.1.2.1 --- RF sputtering --- p.9 / Chapter 3.1.2.2 --- Magnetron Sputtering --- p.10 / Chapter 3.2 --- Deposition system --- p.10 / Chapter 3.2.1 --- Instrumentation --- p.11 / Chapter 3.2.1.1 --- Vacuum system --- p.11 / Chapter 3.2.1.2 --- Sputter target and power supplies --- p.12 / Chapter 3.2.1.3 --- Substrate mounting --- p.13 / Chapter 3.2.2 --- Experimental --- p.13 / Chapter 3.3 --- X-ray Photoelectron Spectroscopy (XPS) --- p.14 / Chapter 3.3.1 --- Basic Principles --- p.14 / Chapter 3.3.2 --- Instrumentation --- p.17 / Chapter 3.3.3 --- Qualitative and quantitative analysis --- p.17 / Chapter 3.3.3.1 --- Spectra interpretations --- p.17 / Chapter 3.3.3.2 --- X-ray emission line width --- p.18 / Chapter 3.3.3.3 --- Qualification --- p.18 / Chapter 3.3.3.3.1 --- Chemical composition --- p.18 / Chapter 3.3.3.3.2 --- Sputter depth profiling --- p.18 / Chapter 3.3.3.3.3 --- Auger parameter --- p.19 / Chapter 3.4 --- Transmission Electron Microscopy (TEM) --- p.19 / Chapter 3.4.1 --- An overview of TEM --- p.19 / Chapter 3.4.2 --- Imaging mode and diffraction mode --- p.21 / Chapter 3.4.3 --- Electron-Specimen interactions --- p.21 / Chapter 3.4.3.1 --- Elastic scattering --- p.22 / Chapter 3.4.3.2 --- Inelastic scattering --- p.22 / Chapter 3.4.4 --- Imaging mechanisms for TEM --- p.23 / Chapter 3.4.4.1 --- Mass-thickness contrast --- p.23 / Chapter 3.4.4.2 --- Diffraction contrast --- p.23 / Chapter 3.4.5 --- TEM sample preparation --- p.25 / Chapter CHAPTER 4 --- Chemical and Structure Characterization of Cu(CuOx)/Al2O3 Composite Thin Films / Chapter 4.1 --- Overview --- p.26 / Chapter 4.2 --- Results and discussions --- p.26 / Chapter 4.2.1 --- Set I: Achieving the stoichiometry of A1203 matrix --- p.26 / Chapter 4.2.2 --- Set II: keeping A1203 stoichiometry and studying on the correlation of CuLMM spectra and average Cu cluster size --- p.32 / Chapter 4.2.2.1 --- Chemical information obtained by XPS --- p.32 / Chapter 4.2.2.2 --- Nanostructure studied by TEM --- p.38 / Chapter 4.2.2.3 --- Mechanical properties inspected by nano-indentation --- p.43 / Chapter 4.2.2.4 --- Optical properties --- p.43 / Chapter 4.2.3 --- Set III: Duration of deposition --- p.44 / Chapter 4.2.4 --- Set VI: Pressure effect on the average size of Cu nanoclusters --- p.45 / Chapter CHAPTER 5 --- Conclusions --- p.48 / References --- p.50

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_324237
Date January 2003
ContributorsXu, Yan., Chinese University of Hong Kong Graduate School. Division of Physics.
Source SetsThe Chinese University of Hong Kong
LanguageEnglish, Chinese
Detected LanguageEnglish
TypeText, bibliography
Formatprint, xi, 51 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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