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Electronic properties of LPCVD silicon films. / Electronic properties of LPCVD silicon films.

by Kwong-hung Tam = 低壓化學氣相沈積硅膜之電學特性 / 譚廣雄. / Thesis (M.Ph.)--Chinese University of Hong Kong, 1985 / Bibliography: leaves 102-105. / by Kwong-hung Tam = Di ya hua xue qi xiang chen ji gui mo zhi dian xue te xing / Tan Guangxiong.

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_319852
Date January 1985
ContributorsTam, Kwong-hung., Chinese University of Hong Kong Graduate School. Division of Physics.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText
Formatprint, iv, 105 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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