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Growth and characterization of CVD Ru and amorphous Ru-P alloy films for liner application in Cu interconnect

Thesis (Ph. D.)--University of Texas at Austin, 2007. / Vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/212375534
Date January 1900
CreatorsShin, Jinhong,
Publisher[Austin, Tex. : University of Texas Libraries,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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