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Mechanistic, surface chemistry, and growth studies of novel precursors for aluminum nitride thin films /

Thesis (Ph. D.)--University of Washington, 1999. / Vita. Includes bibliographical references (leaves 167-187).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/43854588
Date January 1999
CreatorsRobinson, David Walter.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeTheses
SourceConnect to this title online; UW restricted

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