Comparison of ellipso-polarimetry and dark-field methods for determination of thickness variations in thin films /

Description

Thesis (M.S.)--Rochester Institute of Technology, 1991. / Typescript. Includes bibliographical references (67-69).

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1. http://hdl.handle.net/1850/11269

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/27417040
Date	January 1992
Creators	Eubanks, Craig S.
Source Sets	OCLC
Language	English
Detected Language	English
Source	Online version of thesis