Growth and characterization of CVD Ru and amorphous Ru-P alloy films for liner application in Cu interconnect

Description

Thesis (Ph. D.)--University of Texas at Austin, 2007. / Vita. Includes bibliographical references.

Links & Downloads

1. http://www.lib.utexas.edu/etd/d/2007/shinj92176/shinj92176.pdf#page=3

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/212375534
Date	January 1900
Creators	Shin, Jinhong,
Publisher	[Austin, Tex. : University of Texas Libraries,
Source Sets	OCLC
Language	English
Detected Language	English