Characterization of growth and thermal behaviors of thin films for the advanced gate stack grown by chemical vapor deposition

Description

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2002/jeont022/jeont022.pdf#page=4
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3081042

Tags

Thin films Chemical vapor deposition.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/52933916
Date	January 2002
Creators	Jeon, Taek Soo.
Source Sets	OCLC
Language	English
Detected Language	English