In situ infrared spectroscopy study of atomic layer deposition of high-kappa metal oxide and metal on passivated silicon surfaces

Description

Thesis (Ph. D.)--Rutgers University, 2008. / "Graduate Program in Physics and Astronomy." Includes bibliographical references.

Links & Downloads

1. http://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.17453

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/430652334
Date	January 2008
Creators	Dai, Min.
Source Sets	OCLC
Language	English
Detected Language	English