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Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

Thesis (Ph. D.)--School of Chemical Engineering, Georgia Institute of Technology, 2004. Directed by Clifford L. Henderson. / Includes bibliographical references (leaves 366-371).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54951443
Date January 2003
CreatorsBarstow, Sean J.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2004:

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