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Titannitrid- und Titan-Schichten für die Nano-Elektromechanik

Stuttgart, Univ., Diss., 2007.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/315669198
Date January 2007
CreatorsPritschow, Marcus,
Publisher[S.l. : s.n.],
Source SetsOCLC
LanguageGerman
Detected LanguageGerman
TypeOnline-Publikation.
SourceKostenfrei

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