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Experimental study for the local heat transfer on a rectangular substrate in TFT-LCD manufacturing process

Chemical vapor deposition is an important thin film process for the fabrication of TFT-LCD(Thin-Film-Transistor Liquid Crystal Display), the heat transfer coefficient on the substrate is the important influence parameter in the manufacturing process. For this reason, the main object of this thesis is to set up a temperature measurement system of transient thermochromatic liquid crystals. Furthermore, an experimental is carried out in the present study to investigate the characteristics of heat transfer resulting from a low speed air jet impinging onto a rectangular substrate confined in a vertical rectangular chamber. Finally, empirical equations are proposed to correlate the effect of Reynolds number¡BSeparation distances and Ratio of outlet.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0717106-130207
Date17 July 2006
CreatorsSu, Chun-shuo
ContributorsJen-jyh Hwang, Chien-Yuh Yang, Pey-Shey Wu, Ru Yang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0717106-130207
Rightsoff_campus_withheld, Copyright information available at source archive

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