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Preparation of PZT thin films by pulsed laser deposition.

by Au Wing Shing. / Parallel title in Chinese characters. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1992. / Includes bibliographical references (leaves 56-58). / Acknowledgements --- p.i / Abstract --- p.ii / Table of Content --- p.iii / Chapter CHATPER 1 : --- INTRODUCTION --- p.1 / Chapter CHAPTER 2 : --- EXPERIMENTAL SET-UP / Chapter A. --- General Description --- p.4 / Chapter B. --- Vacuum System and Chamber --- p.6 / Chapter C. --- Target Rotation and Motor Connection --- p.7 / Chapter D. --- Substrate Heating and Temperature Control --- p.8 / Chapter E. --- Pressure and Flow Control --- p.9 / Chapter CHAPTER 3 : --- THICKNESS AND COMPOSITION DISTRIBUTIONS OF FILMS DEPOSITED AT ROOM TEMPERATURE / Chapter A. --- Experimental Details --- p.10 / Chapter B. --- Shape of the Plume --- p.12 / Chapter C. --- Effect of Laser Fluence --- p.15 / Chapter D. --- Investigation of the Pb Deficiency in the Deposited Film --- p.24 / Chapter E. --- Effect of Oxygen Pressure --- p.27 / Chapter CHAPTER 4 : --- TARGET MODIFICATION AND DEPOSITION RATE / Chapter A. --- Introduction --- p.34 / Chapter B. --- Experimental Details --- p.40 / Chapter C.i. --- Result 1 : Normal Incidence Case --- p.41 / Chapter ii. --- Result 2 : 45° Incidence Case --- p.42 / Chapter D. --- Discussion --- p.43 / Chapter CHAPTER 5 : --- HIGH TEMPERATURE GROWTH ON DIFFERRENT KINDS OF SUBSTRATES / Chapter A. --- Introduction --- p.45 / Chapter B. --- Experimental Details --- p.47 / Chapter C. --- High Temperature Growth / Chapter i. --- Films grown on MgO (100) --- p.49 / Chapter ii. --- Films grown on Spinel --- p.50 / Chapter iii. --- Films grown on c-plane Sapphire --- p.51 / Chapter D. --- Discussion --- p.52 / Chapter CHAPTER 6 : --- OVERALL CONCLUSION AND FURTHER WORKS --- p.54 / References --- p.56 / Appendix1 --- p.59 / Appendix2 --- p.61

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318925
Date January 1992
ContributorsAu, Wing Shing., Chinese University of Hong Kong Graduate School. Division of Physics.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, iv, 61 leaves, [79] leaves of plates : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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