This master's thesis deals with preparation and analysis of ultrathin films of aluminum and aluminum nitride. Films were prepared by effusion cells designed in previous bachelor's thesis. Cell construction and testing is included in this thesis. Behavior of aluminum on silicon dioxide, silicon and graphene was studied. Preparation of aluminum nitride by effusion cell and nitrogen ion source is described.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:254277 |
| Date | January 2016 |
| Creators | Řihák, Radek |
| Contributors | Čech, Vladimír, Mach, Jindřich |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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