Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

Description

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1381/osbornb53680.pdf

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/58389475
Date	January 2004
Creators	Osborn, Brian Philip, Willson, C. G.
Source Sets	OCLC
Language	English
Detected Language	English