Reduction of water contamination in a vacuum load lock during pumping from atmosphere

Description

Thesis (M.S. - Electrical and Computer Engineering)--University of Arizona. / Includes bibliographical references (leaves 107-108).

Links & Downloads

1. http://etd.library.arizona.edu/etd/GetFileServlet?file=file:///data1/pdf/etd/azu_e9791_1990_463_sip1_w.pdf&type=application/pdf

Tags

Water Vacuum pumps.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/221661741
Date	January 1999
Creators	Shieh, Jhy-Jer,
Source Sets	OCLC
Language	English
Detected Language	English