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Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

Thesis (Ph. D.)--University of Texas at Austin, 2004. / Supervisor: C. Grant Willson. Vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/58389475
Date January 2004
CreatorsOsborn, Brian Philip, Willson, C. G.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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