The deposition of Cu seed layers for electrochemical Cu deposition (ECD) via atomic layer deposition (ALD) of copper oxide and subsequent thermal reduction at temperatures between 110 and 120°C was studied on different diffusion barrier systems. While optimization of the process is required on TaN with respect to reduction and plating, promising results were obtained on blanket PVD Ru. The plating results on layers of ALD Cu with underlying Ru even outperformed the ones achieved on PVD Cu seed layers with respect to morphology and resistivity. Applying the processes to via and line patterns gave similar results, suggesting that a combination of ALD Cu with PVD or ALD-grown Ru could significantly improve the ECD Cu growth.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa.de:bsz:ch1-qucosa-68040 |
| Date | 18 May 2011 |
| Creators | Waechtler, Thomas, Ding, Shao-Feng, Hofmann, Lutz, Mothes, Robert, Xie, Qi, Oswald, Steffen, Detavernier, Christophe, Schulz, Stefan E., Qu, Xin-Ping, Lang, Heinrich, Gessner, Thomas |
| Contributors | Fraunhofer-Institut für Elektronische Nanosysteme ENAS,, TU Chemnitz, Fakultät für Elektrotechnik und Informationstechnik, Fudan University, Department of Microelectronics, TU Chemnitz, Fakultät für Naturwissenschaften, Ghent University, Department of Solid State Science, Leibniz-Institut für Festkörper- und Werkstoffforschung IFW,, Elsevier B.V., |
| Publisher | Universitätsbibliothek Chemnitz |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | doc-type:preprint |
| Format | application/pdf, text/plain, application/zip |
| Source | Microelectronic Engineering, 88, 2011, 5, S. 684-689, DOI: 10.1016/j.mee.2010.07.004 |
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