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Test methodologies of VLSI circuits using scanning electron microscope.

by Chan Lap-kong. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1994. / Includes bibliographical references (leaves 77-80). / ABSTRACT / ACKNOWLEDGEMENTS / LIST OF FIGURES / Chapter 1. --- INTRODUCTION --- p.1 / Chapter 1.1 --- Background --- p.1 / Chapter 1.2 --- Problems in Testing VLSI Circuits --- p.3 / Chapter 1.2.1 --- Test-cost-per-gate --- p.3 / Chapter 1.2.2 --- Tester Complexity --- p.3 / Chapter 1.3 --- Tester Based on Terminals Characteristics -Automatic Testing Equipment(ATE) --- p.4 / Chapter 1.4 --- Tester Based on Terminal and Internal Characteristics --- p.6 / Chapter 1.4.1 --- Mechanical Probing Method --- p.6 / Chapter 1.4.2 --- E-beam Probing Method --- p.7 / Chapter 1.5 --- Movitation for this Research --- p.7 / Chapter 1.6 --- Outline of the Remaining Chapters --- p.9 / Chapter 2. --- E-BEAM TESTER --- p.10 / Chapter 2.1 --- State-of-art of E-Beam Tester --- p.10 / Chapter 2.2 --- An Electron-optical Column of a SEM --- p.12 / Chapter 2.3 --- Beam Rastering Methods --- p.13 / Chapter 2.4 --- Voltage Contrast Phenomenon --- p.14 / Chapter 2.5 --- Configuration of an E-Beam Test System --- p.18 / Chapter 2.6 --- Advantages of an E-beam Tester --- p.20 / Chapter 3. --- BASIC PRINCIPLES --- p.21 / Chapter 3.1 --- Single-Stuck-At Fault Model --- p.21 / Chapter 3.2 --- Observability and Controllability --- p.24 / Chapter 3.3 --- Netlist Format --- p.25 / Chapter 3.4 --- Level --- p.27 / Chapter 3.5 --- Reconvergent Fanout --- p.28 / Chapter 4. --- CONVENTIONAL TEST GENERATION --- p.29 / Chapter 4.1 --- Conventional Automatic Test Generation for ATEs --- p.29 / Chapter 4.3 --- Conventional E-Beam Test Generation --- p.31 / Chapter 5. --- TEST AND PROBE POINT GENERATION --- p.32 / Chapter 5.1 --- Wafer Stage E-beam Testing --- p.32 / Chapter 5.2 --- Critical Paths Generation --- p.33 / Chapter 5.3 --- Assumptions of the Test and Probe Point Generation Algorithm --- p.35 / Chapter 5.4 --- Rules of the Test and Probe Point Generation Algorithm --- p.36 / Chapter 5.5 --- Probe Points Selection and Reduction --- p.38 / Chapter 5.6 --- Test and Probe Point Generation Algorithm --- p.40 / Chapter 5.7 --- Propagation and Justification at Fanout Site --- p.42 / Chapter 6. --- EXAMPLES --- p.45 / Chapter 6.1 --- Example of Test and Probe Point Generation for Circuit sc2 --- p.45 / Chapter 6.2 --- Example of Test and Probe Point Generation for Circuit sfc4 --- p.53 / Chapter 7. --- CONCLUSIONS --- p.61 / Chapter 7.1 --- Summary of Results --- p.61 / Chapter 7.2 --- Further Research --- p.63 / APPENDIX / Appendix A: Algorithm to Find Reconvergent Fanouts / Appendix B: Results of Test Generation for Circuit sc1 / Appendix C: Results of Test Generation for Circuit sc3 / REFERENCES --- p.77

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318218
Date January 1994
ContributorsChan, Lap-kong., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, [6], 80 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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