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Characterization of the MEMS directional sound sensor fabricated using the SOIMUMPs process

Thesis (M.S. in Applied Physics and M.S. in Operations Research)--Naval Postgraduate School, June 2008. / Thesis Advisor(s): Karunasiri, Gamani ; Koyak, Robert. "June 2008." Description based on title screen as viewed on August 25, 2008. Includes bibliographical references (p. 89-90). Also available in print.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/244637090
Date January 2008
CreatorsDritsas, Antonios.
PublisherMonterey, Calif. : Naval Postgraduate School,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
Source(1 MB)

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