This thesis presents the theoretical analysis and experiment results of MEMS sensors designed for the application of low frequency vibration sensing. Each sensor consists of a proof mass connected to a folded beam micro-flexure, with an attached capacitive comb drive for displacement sensing. Three comb drive arrangements are evaluated, the transverse, lateral, and tri-plate differential. The sensors are fabricated using the well developed foundry processes of PolyMUMPS and SoiMUMPS. In addition, a capacitance to voltage readout circuit is fabricated using discrete components. Static tests, evaluating the capacitance to displacement relation, are conducted on a six degree of freedom robotic manipulator, and dynamic tests evaluating the sensor response to sinusoidal excitations are conducted on a vibrating beam. The end use of the sensor involves real-time vibration monitoring of automobile mechanical systems, such as power seats, windshield wipers, mirrors, trunks, and windows, allowing for early detection of mechanical faults before catastrophic failure.
| Identifer | oai:union.ndltd.org:TORONTO/oai:tspace.library.utoronto.ca:1807/18839 |
| Date | 15 February 2010 |
| Creators | Rebello, Joel |
| Contributors | Cleghorn, William L., Mills, James |
| Source Sets | University of Toronto |
| Language | en_ca |
| Detected Language | English |
| Type | Thesis |
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