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Selective Free-standing Through-wafer Porous Silicon Membrane (SFTPSM) for Integrated Meta-material Devices

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:wright1369008928
Date20 May 2013
CreatorsYao, Bella Liu
PublisherWright State University / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=wright1369008928
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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