Oxidation and Removal of Thin Organic Films From A Wafer Surface: Fundamentals of Ozonated Water Application and Water Recycle.

Description

Thesis (Ph. D. - Chemical and Environmental Engineering)--University of Arizona, 2001. / We acknowledge that the writer has two page 7's in this resource. (List of figures). Includes bibliographical references (leaves 214-218).

Links & Downloads

1. http://etd.library.arizona.edu/etd/GetFileServlet?file=file:///data1/pdf/etd/azu_e9791_2001_386_sip1_w.pdf&type=application/pdf

Tags

Oxidation. Ozone Water reuse.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/221343149
Date	January 2001
Creators	DeGenova, John
Source Sets	OCLC
Language	English
Detected Language	English