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Fabrication of a vertically stacked grating coupler for optical waveguides in silicon-on-insulator

Couplers that can couple light vertically between stacked waveguides are finding importance in the push towards higher density and lower cost optoelectronics. A compact grating coupler (12.8mum) designed by a former student is implemented in this project. The device is patterned by reactive-ion-etch into silicon-on-insulator with a 250 nm thick device layer, ensuring single mode operation. Alignment marks are patterned into the backside so that aligned bonding can be carried out. A die bonding recipe is developed using an intermediate adhesive film of SU-8-2. A novel approach to creating optically smooth input facets is included in the final steps of the process. Optical testing remains to be done.

Identiferoai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:QMM.116025
Date January 2008
CreatorsBhatnagar, Sameer.
PublisherMcGill University
Source SetsLibrary and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada
LanguageEnglish
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation
Formatapplication/pdf
CoverageMaster of Engineering (Department of Electrical and Computer Engineering.)
RightsAll items in eScholarship@McGill are protected by copyright with all rights reserved unless otherwise indicated.
Relationalephsysno: 002841705, proquestno: AAIMR66962, Theses scanned by UMI/ProQuest.

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