Couplers that can couple light vertically between stacked waveguides are finding importance in the push towards higher density and lower cost optoelectronics. A compact grating coupler (12.8mum) designed by a former student is implemented in this project. The device is patterned by reactive-ion-etch into silicon-on-insulator with a 250 nm thick device layer, ensuring single mode operation. Alignment marks are patterned into the backside so that aligned bonding can be carried out. A die bonding recipe is developed using an intermediate adhesive film of SU-8-2. A novel approach to creating optically smooth input facets is included in the final steps of the process. Optical testing remains to be done.
Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:QMM.116025 |
Date | January 2008 |
Creators | Bhatnagar, Sameer. |
Publisher | McGill University |
Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
Language | English |
Detected Language | English |
Type | Electronic Thesis or Dissertation |
Format | application/pdf |
Coverage | Master of Engineering (Department of Electrical and Computer Engineering.) |
Rights | All items in eScholarship@McGill are protected by copyright with all rights reserved unless otherwise indicated. |
Relation | alephsysno: 002841705, proquestno: AAIMR66962, Theses scanned by UMI/ProQuest. |
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