The marriage of synthetic chemistry to materials science has been well documented in the last decade. The design, synthesis, and utilization of chemical precursors in the MOCVD of electronic materials in particular has received a lot of attention in both academic and industrial circles. The maintenance of this symbiotic relationship is pursued in this work in the hope of discovering chemical forerunners for high-dielectric metal oxide materials. Specifically, it is of interest to isolate chemical precursors for ZTT, a recent entry into the field of high-k composites.
The primary theme of this dissertation is the exploration of the design and synthesis of molecular precursors that possess more than one of the cations found in the final ZTT film. The approach taken to obtain such precursors, referred to in this work as same-source precursors, is to investigate the implementation of the anionic stannylamine ligand, -N(SnMe3)2 in the preparation of heterometallic coordination complexes. The ultimate goal is to procure volatile, low molecular weight compounds that possess more than one of the metals found in ZTT (tin, titanium, and/or zirconium).
The reason for choosing stannylamine ligands is two-fold. First, as was alluded to above, such ligands might provide convenient access to heterometallic complexes possessing tin as one of the metal constituents. Second, since the coordination chemistry of stannyl amines is relatively unexplored compared to alkyl- and silylamine ligands, it is important from a fundamental standpoint to investigate the synthetic utility of this ligand type.
With this motivation in mind, the results reported here accomplishe two major objectives: 1) the synthesis and characterization of a variety of metal complexes coordinated by stannylamines and 2) the design, synthesis, and utilization of heterometallic precursors for use in the MOCVD of ZTT. Thus, in the course of a synthetic investigation towards the goal of same-source ZTT precursors for use in MOCVD processes, a number of metal coordination complexes possessing stannylamine ligands have been synthesized and fully characterized. Consequently, the library of known compounds containing these ligands has been significantly expanded and a novel route to volatile, heterobimetallic aminoalkoxide species has been developed.
| Identifer | oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/4932 |
| Date | 06 November 2004 |
| Creators | Eichler, Jack Frederick |
| Publisher | Georgia Institute of Technology |
| Source Sets | Georgia Tech Electronic Thesis and Dissertation Archive |
| Language | en_US |
| Detected Language | English |
| Type | Dissertation |
| Format | 2416282 bytes, application/pdf |
Page generated in 0.0024 seconds