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A study of the colloidal stability of mixed abrasive slurries of silica and ceria nanoparticles for chemical mechanical polishing

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Identifer	oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:AEU.uuid#3bff6fbf-0a6f-465a-b24b-ecc1111b4bee
Creators	Lin, Fangjian
Publisher	University of Alberta
Source Sets	Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada
Language	English
Detected Language	English
Type	Thesis
Format	application/pdf