Atomistic effects in reactive direct current sputter deposition

Description

Techn. Hochsch., Diss., 2003--Aachen.

Links & Downloads

1. http://sylvester.bth.rwth-aachen.de/dissertationen/2004/063/index.htm
2. http://deposit.d-nb.de/cgi-bin/dokserv?idn=970934750
3. http://sylvester.bth.rwth-aachen.de/dissertationen/2004/063/04_063.pdf

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/176910108
Creators	Kappertz, Oliver.
Source Sets	OCLC
Language	English
Detected Language	English
Type	Online-Publikation.