The diploma thesis deals with selective growth of cobalt thin films on lattices created by focused ion beam on Si(111) substrates with thin film of silicon dioxide. Further, the growth and morphology of iron thin films growing on Si/SiO2 substrate without modification was studied. In the last part, thin film of a-C:H, influence of preparation parameters on their growth and ratio of sp2 and sp3 bonds, was investigated. For analysis of those films XPS, AFM, and SEM metods were used.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:228773 |
| Date | January 2009 |
| Creators | Šimíková, Michaela |
| Contributors | Schneeweiss, Oldřich, Čechal, Jan |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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