In this thesis, novel technology for manufacturing high-performance hydrogenated amorphous silicon (a-Si:H) TFT is developed . In the bottom gate light-shied a-Si:H TFT structure, the side edge of a-Si:H island is capped with extra deposition of heavily phosphorous-doped a-Si layer. The new structure a-Si:H TFT process steps is almost unchanged. The masksteops of fabrication new structure TFT are the same as the inverter-staggered TFT. Such an ingenuity can effectively eliminate the leakage path between the parasitic contacts between source/drain metal and a-Si:H at the edge of a-Si:H island. a-Si:H is a well-known photosensitivity material. For driving LCD the TFT must be operated with illuminated environment. It will cause the leakage current. The new TFT structure is similar to the light-shield TFT proposed by Akiyama in 1989. So the new structure TFT can not only reduce the schoktty emission leakage current but also the photo-leakage current. In addition, electrical performance of the novel a-Si:H TFT device exhibits superior effective carrier mobility, as high as 1.05 cm2/Vsec due to the enormous improvement in parasitic resistance. The impressively high performance provides the potential of our proposed a-Si:H TFT to apply for AMLCD and AMOLED technology.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0708105-164804 |
| Date | 08 July 2005 |
| Creators | Wang, Quo-Qang |
| Contributors | Ting-Chang Chang, An-Kuo Chu, Po-Tsun Liu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0708105-164804 |
| Rights | not_available, Copyright information available at source archive |
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